Short Wavelength Laboratory Sources: Principles and Practices
Our ability to manipulate short wavelength radiation (0.01-100nm, equivalent to 120keV-12eV) has increased significantly over the last three decades. This has lead to major advances in applications in a wide range of disciplines such as: the life and medical sciences, including cancer-related studies; environmental science, including studies of pollution and its effects; archaeology and other cultural heritage disciplines; and materials science. Although expansion in application areas is due largely to modern synchrotron sources, many applications will not become widespread, and therefore routinely available as analytical tools, if they are confined to synchrotrons. There is a need to develop bright but small and low cost X-ray sources, not to replace synchrotrons but to complement them and this book will look at how to facilitate these developments.
Written by a distinguished team of international authors, this book is based on the COST Action MP0601: Short Wavelength Laboratory Sources. The contents are divided into five main sections. the introductory section provides a comprehensive introduction to the fundamentals of radiation, generation mechanisms and short wavelength laboratory sources. The middle sections focus on modelling and simulation, source development: improvement and characterisation and integrated systems: sources, optics and detectors. The final section looks at recent applications.
Aimed at academic and industrial researchers in physical chemistry and chemical physics, the contents provides practical information about the implementation of short wavelength laboratory sources and their applications.
Short Wavelength Laboratory Sources: Principles and Practices, The Royal Society of Chemistry, 2014.
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Atomic and Plasma Physics Software and Databases for the Simulation of Short Wavelength Sourcesp1-13ByF. de Dortan;F. de DortanInstitute of Physics, Academy of Sciences of the Czech RepublicPragueCzech RepublicInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:D. Kilbane;D. KilbaneUniversity College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:J. Vyskočil;J. VyskočilCzech Technical UniversityPragueCzech RepublicSearch for other works by this author on:P. Zeitoun;P. ZeitounLaboratoire d′Optique Appliquée, ENSTA ParisTech, Chemin de la huniere91671PalaiseauFranceSearch for other works by this author on:A. Gonzalez;A. GonzalezInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:A. de la Varga;A. de la VargaInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:O. Guilbaud;O. GuilbaudLaboratoire de Physique des Gaz et des Plasmas, Universite Paris XI91761OrsayFranceSearch for other works by this author on:D. Portillo;D. PortilloInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:M. Cotelo;M. CoteloInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:A. Barbas;A. BarbasInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:P. VelardeP. VelardeInstitute of Nuclear FusionUPM, MadridSpainSearch for other works by this author on:
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Modelling of Plasma-Based Seeded Soft X-ray Lasersp14-24ByE. Oliva;E. OlivaLaboratoire d'Optique Appliquée, ENSTA ParisTech, Ecole Polytechnique ParisTech, CNRS, Chemin de la Hunière91761PalaiseauFranceSearch for other works by this author on:T. T. Thuy Le;T. T. Thuy LeLaboratoire d'Optique Appliquée, ENSTA ParisTech, Ecole Polytechnique ParisTech, CNRS, Chemin de la Hunière91761PalaiseauFranceSearch for other works by this author on:P. ZeitounP. ZeitounLaboratoire d'Optique Appliquée, ENSTA ParisTech, Ecole Polytechnique ParisTech, CNRS, Chemin de la Hunière91761PalaiseauFranceSearch for other works by this author on:
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Field Coherence of EUV Sourcesp25-41ByOlivier GuilbaudOlivier GuilbaudLaboratoire de Physique des Gaz et Plasma, Unité Mixte CNRS Université Paris-SudFranceSearch for other works by this author on:
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Reachable Extreme Ultraviolet Wavelengths According to Elements / Atomic Datap42-48ByD. Kilbane;D. KilbaneUniversity College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:F. de Dortan;F. de DortanDepartment of Ultraintense Lasers, Division of High Power Systems/PALS Centre, Institute of Physics of the Czech Academy of ScienceNa Slovance 2. 182 21 Prague 8 Czech RepublicSearch for other works by this author on:G. O'Sullivan;G. O'SullivanUniversity College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:V. ZakharovV. ZakharovEPPRA sas, Villebon-sur-Yvette91140FranceSearch for other works by this author on:
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Absorption of Short Pumping Pulses for Grazing Incidence Pumped X-ray Lasersp49-64ByD. UrsescuD. UrsescuNational Institute for Lasers, Plasma and Radiation PhysicsAtomistilor Str. 409Bucharest-MagureleRomaniaSearch for other works by this author on:
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Theoretical Analysis and Experimental Applications of X-ray Waveguidesp65-84ByI. Bukreeva;I. BukreevaCNR Istituto Fotonica e NanotecnologieV. Cineto Romano, 4200156RomeItalyShubnikov Institute of CrystallographyLeninsky prospekt 59Moscow119333RussiaLebedev Physics InstituteLeninsky prospekt 53Moscow119991RussiaSearch for other works by this author on:D. Pelliccia;D. PellicciaSchool of Physics, Monash UniversityVictoria 3800AustraliaSearch for other works by this author on:A. Cedola;A. CedolaCNR Istituto Fotonica e NanotecnologieV. Cineto Romano, 4200156RomeItalySearch for other works by this author on:A. Sorrentino;A. SorrentinoALBA Synchrotron Light Source08290 Cerdenyola del VallèsBarcelonaSpainSearch for other works by this author on:F. Scarinci;F. ScarinciCNR Istituto Processi Chimico-FisiciUOS Roma, c/o Dip. Fisica, Università Sapienza, P.le A. Moro200185RomeItalySearch for other works by this author on:M. Ilie;M. IlieCNR Istituto Processi Chimico-FisiciUOS Roma, c/o Dip. Fisica, Università Sapienza, P.le A. Moro200185RomeItalySearch for other works by this author on:M. Fratini;M. FratiniCNR Istituto Fotonica e NanotecnologieV. Cineto Romano, 4200156RomeItalySearch for other works by this author on:V.E. Asadchikov;V.E. AsadchikovShubnikov Institute of CrystallographyLeninsky prospekt 59Moscow119333RussiaSearch for other works by this author on:V.L. Nosik;V.L. NosikShubnikov Institute of CrystallographyLeninsky prospekt 59Moscow119333RussiaSearch for other works by this author on:S. LagomarsinoS. LagomarsinoCNR Istituto Fotonica e NanotecnologieV. Cineto Romano, 4200156RomeItalySearch for other works by this author on:
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Table-Top Soft X-ray Ar+8 Lasers Excited By Capillary Z-Pinchesp85-101ByJ. Szasz;J. SzaszDepartment of Physics, University of PecsHungarySearch for other works by this author on:M. Kiss;M. KissDepartment of Physics, University of PecsHungarySearch for other works by this author on:I. Santa;I. SantaDepartment of Physics, University of PecsHungarySearch for other works by this author on:S. Szatmari;S. SzatmariDepartment of Experimental Physics, University of SzegedHungarySearch for other works by this author on:S.V. KukhlevskyS.V. KukhlevskyDepartment of Physics, University of PecsHungarySearch for other works by this author on:
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Nanometre Scale Tapered Planar Waveguides for Focusing X-ray Femtosecond Pulsesp102-108ByS.V. KukhlevskyS.V. KukhlevskyDepartment of Physics, University of PecsHungarySearch for other works by this author on:
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Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmasp109-118ByT. Higashiguchi;T. HigashiguchiDepartment of Advanced Interdisciplinary Sciences, Utsunomiya UniversityYoto 7-1-2Utsunomiya, Tochigi321-8585JapanSearch for other works by this author on:B. Li;B. LiSchool of Physics, University College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:R D'Arcy;R D'ArcySchool of Physics, University College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:P. Dunne;P. DunneSchool of Physics, University College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:Gerry O'SullivanGerry O'SullivanSchool of Physics, University College DublinBelfield, Dublin 4IrelandSearch for other works by this author on:
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Laser Produced Plasma X-ray and EUV Sources for Lithographyp119-130ByG. O'SullivanG. O'SullivanUniversity College Dublin, School of Physics, Science CentreBelfield, Dublin 4IrelandSearch for other works by this author on:
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Practical Aspects of XUV Generation by Non-Linear Frequency Conversionp131-149ByBill BrocklesbyBill BrocklesbyOptoelectronics Research Centre, University of SouthamptonHighfield, Southampton, Hampshire. SO17 1BJUKSearch for other works by this author on:
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Electron Trajectories in High Harmonic Generationp150-162ByI.B. Földes;I.B. FöldesDepartment of Plasma Physics, Association EURATOM, Wigner Research Centre for Physics of the Hungarian Academy of SciencesH-1121 Budapest, Konkoly-Thege u. 29-33HungarySearch for other works by this author on:K. VarjúK. VarjúDepartment of Optics and Quantum Electronics, University of SzegedH-6720 Szeged, Dóm tér 9HungarySearch for other works by this author on:
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Modified Cathode Tube: X-ray and XUV Radiation for Nanoinspectionp163-178ByU. Hinze;U. HinzeLaser Zentrum Hannover e.V.Hollerithallee 8D-30419HannoverGermanySearch for other works by this author on:B. ChichkovB. ChichkovLaser Zentrum Hannover e.V.Hollerithallee 8D-30419HannoverGermanySearch for other works by this author on:
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Characteristics of a Sub-Picosecond Titanium Kα Source Using Relativistically Intense Lasersp179-206ByU. Zastrau;U. ZastrauInstitute for Optics and Quantum Electronics, Friedrich-Schiller-University of Jena07743 JenaGermanyMatter in Extreme Conditions MEC, Linac Coherent Light Source LCLS, SLAC National Accelerator LaboratoryMenlo ParkCalifornia94025USASearch for other works by this author on:I. Uschmann;I. UschmannInstitute for Optics and Quantum Electronics, Friedrich-Schiller-University of Jena07743 JenaGermanyHelmholtz Institute Jena07743 JenaGermanySearch for other works by this author on:E. Förster;E. FörsterInstitute for Optics and Quantum Electronics, Friedrich-Schiller-University of Jena07743 JenaGermanyHelmholtz Institute Jena07743 JenaGermanySearch for other works by this author on:A. Sengebusch;A. SengebuschInstitute for Physics, University of Rostock18051 RostockGermanySearch for other works by this author on:H. Reinholz;H. ReinholzInstitute for Physics, University of Rostock18051 RostockGermanySearch for other works by this author on:G. Röpke;G. RöpkeInstitute for Physics, University of Rostock18051 RostockGermanySearch for other works by this author on:E. Kroupp;E. KrouppFaculty of Physics, Weizmann Institute of ScienceRehovot 76100IsraelSearch for other works by this author on:E. Stambulchik;E. StambulchikFaculty of Physics, Weizmann Institute of ScienceRehovot 76100IsraelSearch for other works by this author on:Y. MaronY. MaronFaculty of Physics, Weizmann Institute of ScienceRehovot 76100IsraelSearch for other works by this author on:
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Bremsstrahlung X-ray Emission in Electron-Beam-Pumped KrF Lasersp207-232ByV.D. Zvorykin;V.D. ZvorykinNational Research Nuclear University “MEPhI”Kashirskoe Shosse 31Moscow115409RussiaSearch for other works by this author on:S.V. ArlantsevS.V. ArlantsevMoscow Institute of Physics and Technology (State University)9 Institutskii Pereulok, Dolgoprudnyi, Moscow Region141700Russia[email protected]Search for other works by this author on:
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The Bern Advanced Glass Laser for Experiment (Beagle( X-ray Laser Facilityp233-244ByDavide Bleiner;Davide BleinerInstitute for Applied Physics, University of BernSidlerstrasse 5CH-3012BernSwitzerlandSearch for other works by this author on:Felix StaubFelix StaubInstitute for Applied Physics, University of BernSidlerstrasse 5CH-3012BernSwitzerlandSearch for other works by this author on:
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Enea Extreme Ultraviolet Lithography Micro-Exposure Tool Main Featuresp245-269ByS. Bollanti;S. BollantiENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:P. Di Lazzaro;P. Di LazzaroENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:F. Flora;F. FloraENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:L. Mezi;L. MeziENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:D. Murra;D. MurraENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:A. TorreA. TorreENEA Frascati Research Center, Technical Unit for Application of Radiationvia E. Fermi 45, 00044 Frascati (Rome)ItalySearch for other works by this author on:
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Characterisation and Mitigation of Ions and Particulate Emitted by Sources for Extreme Ultraviolet Lithographyp270-282ByP. Di Lazzaro;P. Di LazzaroENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:S. Bollanti;S. BollantiENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:F. Flora;F. FloraENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:L. Mezi;L. MeziENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:D. Murra;D. MurraENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:A. TorreA. TorreENEA Frascati Research Centre, Technical Unit APRADP.O. Box 65 00044Frascati, RomeItalySearch for other works by this author on:
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EUV Multilayer Optics: Design, Development and Metrologyp283-312ByP. NicolosiP. NicolosiUniversity of Padova, Dept of Information Engineeringvia Gradenigo 6/B Padova, 35131, Italy and National Research Council-Istituto di Fotonica e Nanotecnologie, IFN-CNR, via Trasea 7, Padova, 35131ItalySearch for other works by this author on:
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Applications of KrF Lasers for Generating Coherent EUV Radiationp313-325ByI.B. Földes;I.B. FöldesDepartment of Plasma Physics, Association EURATOM, Wigner Research Centre for Physics of the Hungarian Academy of SciencesH-1121 Budapest, Konkoly-Thege u. 29-33HungarySearch for other works by this author on:S. SzatmáriS. SzatmáriDepartment of Experimental Physics, University of SzegedH-6720 Szeged, Dóm tér 9HungarySearch for other works by this author on:
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Broadband Multilayers: Tailor Made Mirrors for Linearly Polarized X-rays from a Laser Plasma Sourcep326-332
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Short Wavelength Laboratory Sources for Semiconductor Inspection and Fabricationp333-357ByDavide Bleiner;Davide BleinerInstitute for Applied Physics, University of BernSidlerstrasse 5CH-3012BernSwitzerlandSearch for other works by this author on:Mabel Ruiz-LopezMabel Ruiz-LopezInstitute for Applied Physics, University of BernSidlerstrasse 5CH-3012BernSwitzerlandSearch for other works by this author on:
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Carbon-Nanotubes Field Emitter to be Used in Advanced X-ray Sourcep358-365ByM. Fratini;M. FratiniCNR Istituto Fotonica e NanotecnologieV. Cineto Romano 4200156RomeItalySearch for other works by this author on:S. Iacobucci;S. IacobucciCNR Istituto Fotonica e NanotecnologieV. Cineto Romano 4200156RomeItalyDipartimento di Fisica, Università RomaTREVia della Vasca Navale 8400146RomeItalySearch for other works by this author on:A. Rizzo;A. RizzoDipartimento di Fisica, Università RomaTREVia della Vasca Navale 8400146RomeItalySearch for other works by this author on:F. Scarinci;F. ScarinciCNR Istituto Fotonica e NanotecnologieV. Cineto Romano 4200156RomeItalySearch for other works by this author on:Y. Zhang;Y. ZhangEngineering Department, University of CambridgeCambridge CB2 1PZUKSearch for other works by this author on:W.I. Milne;W.I. MilneEngineering Department, University of CambridgeCambridge CB2 1PZUKSearch for other works by this author on:A. Cedola;A. CedolaCNR Istituto Fotonica e NanotecnologieV. Cineto Romano 4200156RomeItalyCNR Istituto Processi Chimico-FisiciUOS Roma, c/o Dip. Fisica, Università Sapienza P.le A. Moro 200185RomeItalySearch for other works by this author on:G. Stefani;G. StefaniEngineering Department, University of CambridgeCambridge CB2 1PZUKSearch for other works by this author on:S. LagomarsinoS. LagomarsinoCNR Istituto Processi Chimico-FisiciUOS Roma, c/o Dip. Fisica, Università Sapienza P.le A. Moro 200185RomeItalySearch for other works by this author on:
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Laser-Plasma EUV Source for Modification of Polymer Surfacesp366-372ByA. Bartnik;A. BartnikInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:H. Fiedorowicz;H. FiedorowiczInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:R. Jarocki;R. JarockiInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:J. Kostecki;J. KosteckiInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:L. Pina;L. PinaFaculty of Nuclear Sciences and Physical Engineering, Czech Technical University180 00 Prague 8Czech RepublicSearch for other works by this author on:M. Szczurek;M. SzczurekInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:P. WachulakP. WachulakInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:
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A Sub-Picosecond Plasma Source for Time-Resolved X-ray Measurementsp373-380ByT. Kämpfer;T. KämpferInstitute for Optics and Quantum Electronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholtz-Institute JenaFröbelstieg 307743 JenaGermanySearch for other works by this author on:S. Höfer;S. HöferInstitute for Optics and Quantum Electronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholtz-Institute JenaFröbelstieg 307743 JenaGermanySearch for other works by this author on:R. Loetzsch;R. LoetzschInstitute for Optics and Quantum Electronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholtz-Institute JenaFröbelstieg 307743 JenaGermanySearch for other works by this author on:I. Uschmann;I. UschmannInstitute for Optics and Quantum Electronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholtz-Institute JenaFröbelstieg 307743 JenaGermanySearch for other works by this author on:E. FörsterE. FörsterInstitute for Optics and Quantum Electronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholtz-Institute JenaFröbelstieg 307743 JenaGermanySearch for other works by this author on:
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Application of Focused X-ray Beams in Radiation Biologyp381-397ByJ. Lekki;J. LekkiInstitute of Nuclear Physics, Polish Academy of SciencesKrakówPolandSearch for other works by this author on:J. Bielecki;J. BieleckiInstitute of Nuclear Physics, Polish Academy of SciencesKrakówPolandSearch for other works by this author on:S. Bożek;S. BożekInstitute of Nuclear Physics, Polish Academy of SciencesKrakówPolandJagiellonian University Medical College, Faculty of Pharmacokinetics and Physical PharmacyKrakówPolandSearch for other works by this author on:Z. StachuraZ. StachuraInstitute of Nuclear Physics, Polish Academy of SciencesKrakówPolandSearch for other works by this author on:
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Time-Resolved X-ray Diffraction of Cryogenic Samples Using a Laser Based Plasma Sourcep398-406ByR. Loetzsch;R. LoetzschInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholz-Institute JenaFröbelstieg 307743JenaGermanySearch for other works by this author on:A. Lübcke;A. LübckeInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyMax-Born Institute for Nonlinear Optics and Short Pulse SpectroscopyMax-Born-Straße 2A12489 BerlinGermanySearch for other works by this author on:F. Zamponi;F. ZamponiInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyInstitute of Physics and Astronomy, University of PotsdamKarl-Liebknecht-Strasse 24-2514476 PostdamSearch for other works by this author on:T. Kämpfer;T. KämpferInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholz-Institute JenaFröbelstieg 307743JenaGermanySearch for other works by this author on:I. Uschmann;I. UschmannInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholz-Institute JenaFröbelstieg 307743JenaGermanySearch for other works by this author on:E. FörsterE. FörsterInstitute for Optic und Quantum Elektronics, Friedrich Schiller University JenaMax-Wien-Platz 107743JenaGermanyHelmholz-Institute JenaFröbelstieg 307743JenaGermanySearch for other works by this author on:
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Near-Edge X-ray Absorption Fine Structure Measurements Using a Laboratory-Scale XUV Sourcep407-413ByK. MannK. MannLaser-Laboratorium Göttingen e.V.Hans-Adolf-Krebs-Weg 1D-37077GöttingenGermanySearch for other works by this author on:
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Nanometer Scale Imaging Using a Desk-Top Laser Plasma EUV Sourcep414-418ByP.W. Wachulak;P.W. WachulakInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:A. Bartnik;A. BartnikInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:H. FiedorowiczH. FiedorowiczInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:
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Laser-Plasma EUV and Soft X-ray Sources for Microscopy Applicationsp419-424ByP.W. Wachulak;P.W. WachulakInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:A. Bartnik;A. BartnikInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:H. Fiedorowicz;H. FiedorowiczInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:T. Feigl;T. FeiglFraunhofer Institut für Angewandte Optik und Feinmechanik (IOF)07745 JenaGermanySearch for other works by this author on:R. Jarocki;R. JarockiInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:J. Kostecki;J. KosteckiInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:L. Pina;L. PinaFaculty of Nuclear Sciences and Physical Engineering, Czech Technical University180 00 Praha 8Czech RepublicSearch for other works by this author on:M. Szczurek;M. SzczurekInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:A. Szczurek;A. SzczurekInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:Z. ZawadzkiZ. ZawadzkiInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:
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Nanometer Scale Imaging with Table-Top Extreme Ultraviolet Laserp425-430ByP.W. Wachulak;P.W. WachulakInstitute of Optoelectronics, Military University of Technology00-908WarsawPolandSearch for other works by this author on:A. Isoyan;A. IsoyanSynopsys, Inc.2025 NW Cornelius Pass RoadHillsboro, OR97124USASearch for other works by this author on:R.A. Bartels;R.A. BartelsNSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State UniversityFort CollinsCO 80523USASearch for other works by this author on:C.S. Menoni;C.S. MenoniNSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State UniversityFort CollinsCO 80523USASearch for other works by this author on:J.J. Rocca;J.J. RoccaNSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State UniversityFort CollinsCO 80523USASearch for other works by this author on:M.C. MarconiM.C. MarconiNSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State UniversityFort CollinsCO 80523USASearch for other works by this author on:
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Development and Optimization of Laser-Plasma Extreme Ultraviolet and Soft X-ray Sources for Microscopy Applicationsp431-446ByP.W. Wachulak;P.W. WachulakInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:A. Bartnik;A. BartnikInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:J. Kostecki;J. KosteckiInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:R. Jarocki;R. JarockiInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:M. Szczurek;M. SzczurekInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:H. FiedorowiczH. FiedorowiczInstitute of Optoelectronics, Military University of Technology00-908 WarsawPolandSearch for other works by this author on:
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