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This chapter discusses the observation of intense XUV emission generated from a hollow cathode micro-discharge source. The emission in the 40 nm XUV spectral region has been characterized from capillary discharge and laser-produced plasmas containing potassium ions with time-averaged electron temperatures of 12 eV and electron densities of 1020 cm−3. Atomic structure calculations with the Cowan code together with available spectral data were used to generate theoretical spectra to compare with the observed emission.

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