Modified Cathode Tube: X-ray and XUV Radiation for Nanoinspection

This chapter gives a short overview of sources for metrology in the EUV and X-ray spectral range, with a discussion of their properties. The physics and operation principles of a modified X-ray tube for EUV radiation as are presented. Different wavelength ranges that can be accessed and investigated with this tool are identified and discussed. Continuous and pulsed tube operation are described and characterized. For the EUV spectral range two metrological applications are presented, namely a simple and compact setup for the characterization of optics (mirrors, filters, sensors) and a complex reflectometer for the characterization of large collector optics with high numerical aperture for EUV lithography.