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A prototype tailored broadband multilayer reflector has been developed that accepts the entire emission spectrum of interest of an XUV laser plasma source (≈300 eV) with an energy bandwidth of ≈17%, which is ten times higher than for a typical periodic multilayer. It has been shown that very large energy bandwidths can be achieved with depth-graded multilayer mirrors. These graded layer stacks can be fabricated with very high accuracy and deliver experimental results close to theoretical values. The application of this technique for higher energies has also been tested, and looks very promising especially in terms of peak reflectivities. Furthermore, improvements to the simulation and fabrication processes seem feasible, permitting precise tailoring of the spectral characteristics of multilayers. NEXAFS experiments with linearly polarized radiation from table-top laser plasma sources are in progress.

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