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A new laser-plasma EUV source dedicated for modification of polymer surfaces developed during the COST Action MP0601 Short Wavelength Laboratory Sources has been presented. The source is based on the double-stream gas-puff target approach and equipped with an axisymmetrical grazing incidence ellipsoidal mirror for EUV beam focusing. The source was designed and built under the EUREKA project E!3892 ModPolEUV in close cooperation with industrial partners (EKSPLA, Reflex, PREVAC). The source has been used successfully in investigations on modification of surfaces from various polymers and preliminary studies on the cultivation of biological cells on EUV modified polymer surfaces. The source should be useful in the research on biocompatibility control of polymer materials.

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