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This chapter presents NEXAFS measurements that were obtained using a laboratory scale setup based on a laser driven plasma source. It has already been shown that the generation of broad band emission in the spectral range of the “water window” (wavelengths of 2.2–4.4 nm) can be achieved by using solid state targets such as gold or copper. Here, a flexible setup to generate broad band soft X-rays based on a gas puff target, where new target material is supplied continuously with the advantage of low debris, is presented. The table top setup, consisting of the laser plasma source and a flat field spectrometer can be used for NEXAFS experiments in transmission as well as reflection under grazing incidence conditions. For transmission measurements thin films have to be used due to the low penetration depth of soft X-rays into matter.

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