Skip Nav Destination
Short Wavelength Laboratory Sources: Principles and Practices
Edited by
Davide Bleiner;
Davide Bleiner
University of Bern, Switzerland
Search for other works by this author on:
John Costello;
John Costello
Dublin City University, Ireland
Search for other works by this author on:
Francois de Dortan;
Francois de Dortan
Institute of Nuclear Fusion- DENIM, UPM, Spain
Search for other works by this author on:
Ladislav Pina;
Ladislav Pina
Czech Technical University, Czech Republic
Search for other works by this author on:
Alan Michette
Alan Michette
Kings College London, UK
Search for other works by this author on:
Hardback ISBN:
978-1-84973-456-1
PDF ISBN:
978-1-84973-501-8
No. of Pages:
451
Published online:
04 Dec 2014
Published in print:
15 Dec 2014
Book Chapter
Nanometer Scale Imaging Using a Desk-Top Laser Plasma EUV Source
By
P.W. Wachulak
;
P.W. Wachulak
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
Search for other works by this author on:
A. Bartnik
;
A. Bartnik
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
Search for other works by this author on:
H. Fiedorowicz
H. Fiedorowicz
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
Search for other works by this author on:
-
Published:04 Dec 2014
-
Page range:
414 - 418
Citation
P. Wachulak, A. Bartnik, and H. Fiedorowicz, in Short Wavelength Laboratory Sources: Principles and Practices, ed. D. Bleiner, J. Costello, F. de Dortan, G. O'Sullivan, L. Pina, and A. Michette, The Royal Society of Chemistry, 2014, pp. 414-418.
Download citation file:
The development of bright, compact, short wavelength sources is a significant step forward in the commercialization of high resolution imaging tools in the near future. The work done so far in EUV and SXR imaging is very extensive; here, a few examples using coherent and incoherent EUV/SXR sources are presented as pointers for further research.
This content is only available via PDF.
You do not currently have access to this chapter, but see below options to check access via your institution or sign in to purchase.
Digital access
$64.60
