Nanometer Scale Imaging with Table-Top Extreme Ultraviolet Laser

Wachulak, P.W.; Isoyan, A.; Bartels, R.A.; Menoni, C.S.; Rocca, J.J.; Marconi, M.C.

doi:10.1039/9781849735018-00425

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Short Wavelength Laboratory Sources: Principles and Practices

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DOI:

https://doi.org/10.1039/9781849735018

Hardback ISBN:

978-1-84973-456-1

PDF ISBN:

978-1-84973-501-8

Special Collection: 2014 ebook collection , 2011-2015 physical chemistry subject collection

No. of Pages:

451

Published online:

04 Dec 2014

Published in print:

15 Dec 2014

Book Chapter

Nanometer Scale Imaging with Table-Top Extreme Ultraviolet Laser

P.W. Wachulak

Institute of Optoelectronics, Military University of Technology

00-908

Warsaw

Poland

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A. Isoyan

Synopsys, Inc.

2025 NW Cornelius Pass Road

Hillsboro, OR

97124

USA

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R.A. Bartels

NSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State University

Fort Collins

CO 80523

USA

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C.S. Menoni

NSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State University

Fort Collins

CO 80523

USA

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J.J. Rocca

NSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State University

Fort Collins

CO 80523

USA

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M.C. Marconi

NSF ERC for Extreme Ultraviolet Science & Technology and Department of Electrical and Computer Engineering, Colorado State University

Fort Collins

CO 80523

USA

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Doi:

https://doi.org/10.1039/9781849735018-00425

Published:

04 Dec 2014
Special Collection: 2014 ebook collection , 2011-2015 physical chemistry subject collection

Page range:

425 - 430

Decreasing the illumination wavelength provides the potential to improve the spatial resolution in all imaging techniques. Hence there is currently high interest in imaging using laboratory short wavelength sources. This chapter describes approaches to EUV imaging utilizing a compact table-top capillary discharge EUV laser. Various coherent imaging techniques, such as two and three dimensional holography, computer generated holograms (CGHs), EUV reconstruction and generalized Talbot self-imaging will be presented.

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