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Short Wavelength Laboratory Sources: Principles and Practices
Edited by
Davide Bleiner;
Davide Bleiner
University of Bern, Switzerland
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John Costello;
John Costello
Dublin City University, Ireland
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Francois de Dortan;
Francois de Dortan
Institute of Nuclear Fusion- DENIM, UPM, Spain
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Ladislav Pina;
Ladislav Pina
Czech Technical University, Czech Republic
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Alan Michette
Alan Michette
Kings College London, UK
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Hardback ISBN:
978-1-84973-456-1
PDF ISBN:
978-1-84973-501-8
No. of Pages:
451
Published online:
04 Dec 2014
Published in print:
15 Dec 2014
Book Chapter
Development and Optimization of Laser-Plasma Extreme Ultraviolet and Soft X-ray Sources for Microscopy Applications
By
P.W. Wachulak
;
P.W. Wachulak
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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A. Bartnik
;
A. Bartnik
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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J. Kostecki
;
J. Kostecki
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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R. Jarocki
;
R. Jarocki
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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M. Szczurek
;
M. Szczurek
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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H. Fiedorowicz
H. Fiedorowicz
Institute of Optoelectronics, Military University of Technology
00-908 Warsaw
Poland
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Published:04 Dec 2014
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Page range:
431 - 446
Citation
P. Wachulak, A. Bartnik, J. Kostecki, R. Jarocki, M. Szczurek, and H. Fiedorowicz, in Short Wavelength Laboratory Sources: Principles and Practices, ed. D. Bleiner, J. Costello, F. de Dortan, G. O'Sullivan, L. Pina, and A. Michette, The Royal Society of Chemistry, 2014, pp. 431-446.
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In this chapter the first demonstration of a desk-top EUV transmission microscopy at 13.8 nm, with a spatial (half-pitch) resolution as good as 50 nm in a very compact setup, is presented.
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