CHAPTER 3: Micro/nano Fabrication Technologies for Vibration-Based Energy Harvester
Published:20 Mar 2014
Special Collection: 2014 ebook collection , ECCC Environmental eBooks 1968-2022 , 2011-2015 materials and nanoscience subject collectionSeries: Nanoscience & Nanotechnology
Energy harvesting technologies have emerged as a prominent research topic and been quickly developed in recent years due to its wide application, such as wireless sensor nodes for structural health monitoring, biomedical applications for implanted sensors, and automobile applications for tire pressure sensors. Recent development focuses on the novel material, structural optimized design, process integration of micro to nanoscale energy harvesters. This chapter demonstrates the micromachining technologies for the fabrication of micro/nanoscale energy harvesters.