CHAPTER 17: Diamond Nano-electromechanical Systems

Nano-electromechanical systems (NEMS) are extraordinary in their ability to transduce minute mechanical signals into an electrical response. The methods of inducing and detecting mechanical, electrical, or biological signals using diamond NEMS structures are discussed in this chapter. Diamond, with its unique mechanical, thermal, and chemical properties, is a fascinating material. It often outperforms conventional NEMS materials, such as silicon. Advances in thin-film growth and fabrication methods now make it possible to manufacture ever more sensitive devices with far-reaching implications in both applied and fundamental research. This chapter illustrates the inner workings of diamond NEMS devices. Furthermore, opportunities and technological challenges in the field of diamond NEMS are discussed.