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Chemical Vapour Deposition: Precursors, Processes and ApplicationsCheck Access
Hardback ISBN:
978-0-85404-465-8
PDF ISBN:
978-1-84755-879-4
No. of Pages:
600
Published online:
17 Dec 2008
Published in print:
22 Dec 2008
Book Chapter
Preface Check Access
-
Published:17 Dec 2008
Page range:
P005
Citation
Chemical Vapour Deposition: Precursors, Processes and Applications, ed. A. C. Jones and M. L. Hitchman, The Royal Society of Chemistry, 2008, pp. P005.
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