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Chemical Vapour Deposition: Precursors, Processes and Applications
Hardback ISBN:
978-0-85404-465-8
PDF ISBN:
978-1-84755-879-4
No. of Pages:
600
Published online:
17 Dec 2008
Published in print:
22 Dec 2008
Book Chapter
Overview of Chemical Vapour Deposition
By
Anthony C. Jones
;
Anthony C. Jones
Department of Chemistry, University of Liverpool, Crown Street
Liverpool
L69 7ZD
UK
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Michael L. Hitchman
Michael L. Hitchman
Thin Film Innovations Ltd.
Block 7
Kelvin Campus
West of Scotland Science Park
Glasgow
G20 0TH
UK
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Published:17 Dec 2008
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Page range:
1 - 36
Citation
Chemical Vapour Deposition: Precursors, Processes and Applications, ed. A. C. Jones and M. L. Hitchman, The Royal Society of Chemistry, 2008, pp. 1-36.
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