CVD Reactors and Delivery System Technology

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Chemical Vapour Deposition: Precursors, Processes and Applications

Edited by

DOI:

Hardback ISBN:

978-0-85404-465-8

PDF ISBN:

978-1-84755-879-4

Special Collection: 2008 ebook collection , 2000-2010 materials and nanoscience subject collection

No. of Pages:

600

Published online:

17 Dec 2008

Published in print:

22 Dec 2008

Book Chapter

Chapter 2: CVD Reactors and Delivery System Technology

Department of Mechanical Engineering, University of Canterbury

Private Bag 4800

Christchurch 8014

New Zealand

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PubMed

Doi:

Page range:

37 - 92

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