Atomic Layer Deposition

Ritala, Mikko; Niinistö, Jaakko

doi:10.1039/9781847558794-00158

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Chemical Vapour Deposition: Precursors, Processes and Applications

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DOI:

https://doi.org/10.1039/9781847558794

Hardback ISBN:

978-0-85404-465-8

PDF ISBN:

978-1-84755-879-4

Special Collection: 2008 ebook collection , 2000-2010 materials and nanoscience subject collection

No. of Pages:

600

Published online:

17 Dec 2008

Published in print:

22 Dec 2008

Book Chapter

Chapter 4: Atomic Layer Deposition

Mikko Ritala

Laboratory of Inorganic Chemistry, University of Helsinki

P.O. Box 55

Helsinki

FI-00014

Finland

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;

Jaakko Niinistö

Laboratory of Inorganic Chemistry, University of Helsinki

P.O. Box 55

Helsinki

FI-00014

Finland

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PubMed

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Doi:

https://doi.org/10.1039/9781847558794-00158

Published:

17 Dec 2008
Special Collection: 2008 ebook collection , 2000-2010 materials and nanoscience subject collection

Page range:

158 - 206

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