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Chemical Vapour Deposition: Precursors, Processes and Applications
Hardback ISBN:
978-0-85404-465-8
PDF ISBN:
978-1-84755-879-4
No. of Pages:
600
Published online:
17 Dec 2008
Published in print:
22 Dec 2008
Book Chapter
Chapter 5: Basic Chemistry of CVD and ALD Precursors
By
Mohammad Azad Malik
;
Mohammad Azad Malik
School of Chemistry, The University of Manchester
Oxford Road
Manchester
M13 9PL
UK
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Paul O’brien
Paul O’brien
School of Chemistry, The University of Manchester
Oxford Road
Manchester
M13 9PL
UK
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Published:17 Dec 2008
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Page range:
207 - 271
Citation
M. Azad Malik and P. O’brien, in Chemical Vapour Deposition: Precursors, Processes and Applications, ed. A. C. Jones and M. L. Hitchman, The Royal Society of Chemistry, 2008, ch. 5, pp. 207-271.
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