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Chemical Vapour Deposition: Precursors, Processes and Applications
Hardback ISBN:
978-0-85404-465-8
PDF ISBN:
978-1-84755-879-4
No. of Pages:
600
Published online:
17 Dec 2008
Published in print:
22 Dec 2008
Book Chapter
Chapter 9: Metal-organic Chemical Vapour Deposition of Refractory Transition Metal Nitrides
By
Roland A. Fischer
;
Roland A. Fischer
Lehrstuhl für Anorganische Chemie II
Organometallics and Materials
Ruhr-Universität Bochum
Universitätsstr
150
44801 Bochum
Germany
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Harish Parala
Harish Parala
Lehrstuhl für Anorganische Chemie II
Organometallics and Materials
Ruhr-Universität Bochum
Universitätsstr
150
44801 Bochum
Germany
Search for other works by this author on:
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Published:17 Dec 2008
-
Page range:
413 - 450
Citation
R. A. Fischer and H. Parala, in Chemical Vapour Deposition: Precursors, Processes and Applications, ed. A. C. Jones and M. L. Hitchman, The Royal Society of Chemistry, 2008, ch. 9, pp. 413-450.
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