Commercial Aspects of CVD

Leese, Albert Barry; Mills, Alan Rodney

doi:10.1039/9781847558794-00535

Skip Nav Destination

Chemical Vapour Deposition: Precursors, Processes and Applications

Edited by

DOI:

https://doi.org/10.1039/9781847558794

Hardback ISBN:

978-0-85404-465-8

PDF ISBN:

978-1-84755-879-4

Special Collection: 2008 ebook collection , 2000-2010 materials and nanoscience subject collection

No. of Pages:

600

Published online:

17 Dec 2008

Published in print:

22 Dec 2008

Book Chapter

Chapter 13: Commercial Aspects of CVD

Albert Barry Leese

SAFC Hitech

Power Road

Bromborough

Wirral

CH62 3QF

Search for other works by this author on:

This Site

PubMed

Google Scholar

;

Alan Rodney Mills

Independent Market

Business & Technology Consultant

980 Golden Way

Los Altos CA 94024

USA

Search for other works by this author on:

This Site

PubMed

Google Scholar

Doi:

https://doi.org/10.1039/9781847558794-00535

Published:

17 Dec 2008
Special Collection: 2008 ebook collection , 2000-2010 materials and nanoscience subject collection

Page range:

535 - 570

You do not currently have access to this chapter, but see below options to check access via your institution or sign in to purchase.

Don't already have an account? Register

Chapter 13: Commercial Aspects of CVD

First Page Preview

Digital access

Log in

Chapter 13: Commercial Aspects of CVD

First Page Preview

Log in

Institutional access

My account

Digital access

This Feature Is Available To Subscribers Only