Chapter 18: Micromachined Ionic Polymer Metal Composite Actuators for Biomedical Applications

This chapter focuses on the fabrication of ionic polymer metal composite (IPMC) actuators with micromachining techniques for biomedical applications. Surface as well as bulk micromachining and micromolding techniques are described for fabricating devices such as micro-featured, column-structured, multi-electrode, silicon wafer-integrated, and three-dimensional structured IPMC actuators. Several representative micromachined IPMC actuators for biomedical applications are presented: (1) microgrippers with a feature size of 100 µm and clear, sharp edges for endoscopic-related surgery; (2) an optical fiber enclosed by a four-electrode IPMC actuator with multi-directional maneuverability by electrical control that has experimentally demonstrated the ability to facilitate ocular surgery; and (3) a helical IPMC actuator with rotational and longitudinal mobility that is promising as an active stent for cardiac disease treatment. Operational characteristics and analysis of these micromachined IPMC actuators are discussed.