Chapter 4: Electromechanical Devices

Recently, research in the field of strain/stress sensors has been booming with significant potential for structural health monitoring, nano- and microelectromechanical systems and human–computer interaction. To measure the nano- and microscale strain/stress, various sensors have been fabricated based on one-dimensional nanomaterials, including carbon nanotubes, as well as Si and ZnO nanostructures. Due to their mechanical, electrical and electromechanical properties, ZnO nanomaterials have been considered as promising functional units in electromechanical devices.