2: Device Fabrication Check Access

Microfluidic devices are fabricated using inorganic materials, such as glass and silicon, in manufacturing processes mainly adopted from integrated circuit fabrication. In addition, polymers have also gained in popularity owing to the simplicity of production methods such as injection moulding and hot embossing. This chapter explains the fabrication processes suitable for different materials to make microfluidic devices, including photolithography, etching, soft photolithography, three-dimensional processes, etc., focusing on the principles.